Cold Plates and Chucks

  • Substrate Cooling Plates. - Innovent supplies multiple designs and configurations of substrate cool plates to fit different application needs. These components are tested for a high degree of flatness, pressure rating, and system-fit, then cleaned and packaged per SEMI industry standards in our Class 100 cleanroom
  • Chucks – Innovent designs and manufactures substrate holding chucks that address critical flatness and particulate requirements. They vary in size, surface design, holding force and material composition.