Substrate Handling

Innovent Technologies manufactures and assists in the design of substrate handling components and subassemblies for semiconductor, flat panel, LED and solar OEMs and their end-customers.

Our product lines include:

Custom Designs

3D modeling optimizes all critical design parameters

End effectors

Vacuum & Passive Edge Grip, Single & Multi Pick, Wafer Presence and Mapping

Cold Plates/Chucks

Proven expertise in process sensitive environments

Honeycomb Products

SST/Ti applications focusing on high temperature and ultraclean requirements