Vacuum End Effectors

Case Study

Application & Industry

Unique precision machined Vacuum End Effector used for automated substrate handing in semiconductor tools.

Challenges

The customer submitted a scope of work with requirements for backside vacuum grip for substrates with through-hole vias.

Solutions

By applying FEA techniques, our engineers were able to redesign an end-effector with similar requirements to a uniquely precision machined component with a variable pitch wrist and parameter vacuum grip to support the substrate while being transferred from cassette to its processing position.