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Sorters used in the fabrication process for semiconductor chip manufacturing are designed to operate at the right scale and complexity to efficiently move wafers. The Sorter’s primary objective is to handle wafers swiftly and efficiently while maintaining a high level of cleanliness with minimal particle presence.
A rapid deployment of pure nitrogen is often used to control humidity levels and safeguard wafers against exposure to oxygen and water vapor. This protection prevents oxide growth and copper corrosion while minimizing damage from chemical residues that could react with water vapor.
To address the challenge of microscopic airborne molecular contamination, chemical filters are often used to maintain a filtered environment. This prevents penetration of contaminants which can adversely affect yield and reliability, especially at smaller manufacturing nodes.
By using Edge-grip Wafer Handling End Effectors, which is one of Innovent’s specialties, a Sorter can achieve quick swap times for demanding applications.
To prevent backside particles from impacting performance, a Low Contact Backside End Effector is used. This is crucial as manufacturing processes shrink. It reduces migration of particles from the edges or backside of wafers, minimizing defects.
We use advanced techniques and materials to make these parts, ensuring they are of the highest quality. The robot wrists allow for precise movements, which is essential for accurate wafer handling. The end effectors are designed and crafted carefully to securely and with extreme accuracy, hold the wafers during testing. These parts have special features that make the whole process smoother and faster.
We take great pride in producing components that meet the strict requirements of the semiconductor industry. Because our products are in direct contact with the silicon wafers, adherence to the strictest of cleanliness standards is imperative. Our dedication to precision and quality contributes to the overall efficiency and reliability of wafer handling and testing processes.
By providing these precision machined components, Innovent Technologies plays a crucial role in making sure semiconductor fabrication facilities are handling wafers with superior reliability and care.
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