Cleanroom Assembled Facility & Cool Plates For Your Critical Applications

Innovent supplies multiple designs and configurations of substrate cool plates to fit different application needs.

These components are tested for a high degree of flatness, pressure rating, and system-fit, then cleaned and packaged per SEMI industry standards in our Class 100 cleanroom.

Aluminum wafer cool plate with dual wafer support assembly. Potted copper tubing increases heat transfer into the plate. Quick disconnect fittings for easy install. Pressure tested to 100PSI.

Aluminum wafer cool plate. Potted SST tubing is welded to support bracket for increased stiffness. Pressure tested 150 PSI.

Aluminum facility plate with E-Beam welded covers, allows for cooling medium to pass through the plate in any shaped path. E-Beam weld seems are helium leak-checked into the 9-scale for vacuum. Finishes in this application were Tuff-Coat anodize and electroless nickel plating.

Aluminum facility plate with E-Beam welded covers and rings, allows for cooling medium to pass through the plate in any shaped path. E-Beam weld seams are helium leak-checked into the 9-scale for vacuum. Pictured here without gold plating and Tuff-Coat anodize.